 8414100010 
耐腐蚀真空泵
Corrosion-resistent vaccum pumps (flow rate＞5m3/h, with contact surface being made of special corrosion-resistent materials) |
8414100040
专门设计或制造的抽气能力≥5m3/min的真空泵
Specially-designed or specially-made vaccum pumps with exhaust capacity≥5m3/min (used exclusively for diffusion and concentration of isotopic gases |
8414100030
能在含UF6气氛中使用的真空泵
Vaccum pumps that can be used in UF6 atmosphere(made of aluminium, nickel or alloys with the content of nickel being more than 60% or used as a lining) |
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8414100050
能在含UF6气氛中使用的真空泵
Vaccum pumps that can be used in UF6 atmosphere(UF6-resistent pumps can be sealed with fluorocarbon or special working fluid) |
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8414100020
真空泵
Vaccum pumps (intel≥38cm, speed≥15kl/s, vacuum extremity＜10-4torr) |
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